Nitrogen dissociation and parametric study in a magnetic pole enhanced inductively coupled Ar-N₂ plasma (MaPE-ICP)

Author： Abrar M. Khan A.W. Saeed A. Naseer S. Qayyum A. Zakaulah M.

E-ISSN： 1286-0050|62|3|30801-30801

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.62, Iss.3, 2013-06, pp. : 30801-30801

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