In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Author： Hafiz Md Abdullah Al   Kosuru Lakshmoji   Ramini Abdallah   Chappanda Karumbaiah N.   Younis Mohammad I.  

Publisher： MDPI

E-ISSN： 2072-666x|7|10|191-191

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.10, 2016-10, pp. : 191-191

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