Integrated Magnetic MEMS Relays: Status of the Technology

Author： Schiavone Giuseppe   Desmulliez Marc P. Y.   Walton Anthony J.  

Publisher： MDPI

E-ISSN： 2072-666x|5|3|622-653

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.3, 2014-08, pp. : 622-653

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