Effect of annealing temperature on structural and electrical properties of high-κ YbTixOy gate dielectrics for InGaZnO thin film transistors

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|1|15004-15011

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.1, 2015-01, pp. : 15004-15011

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