Effect of active layer deposition temperature on the performance of sputtered amorphous In—Ga—Zn—O thin film transistors

Author： Jie Wu Junfei Shi Chengyuan Dong Zhongfei Zou Yuting Chen Daxiang Zhou Zhe Hu Runze Zhan

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.35, Iss.1, 2014-01, pp. : 14003-14008

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