A MEMS XY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Author： Xi Xiang   Clancy Tyler   Wu Xuezhong   Sun Yu   Liu Xinyu  

Publisher： IOP Publishing

E-ISSN： 1361-6439|26|2|25014-25022

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25014-25022

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Reconstruction of height of sub-nanometer steps with bimodal atomic force microscopy

By Lai Chia-Yun   Santos Sergio   Chiesa Matteo  

Nanotechnology, Vol. 27, Iss. 7, 2016-02 ,pp. : 75701-75706

IOP Publishing

Access to resources Recommend Favorite

Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition

By  

Nanotechnology, Vol. 26, Iss. 9, 2015-03 ,pp. : 94002-94012

IOP Publishing

Access to resources Recommend Favorite

A multi-objective method of hinge-free compliant mechanism optimization

By Zhu Benliang   Zhang Xianmin   Fatikow Sergej  

Structural and Multidisciplinary Optimization, Vol. 49, Iss. 3, 2014-03 ,pp. : 431-440

Springer Publishing Company

Access to resources Recommend Favorite

A New XYZ Compliant Parallel Mechanism for Micro-/Nano-Manipulation: Design and Analysis

By Li Haiyang   Hao Guangbo   Kavanagh Richard C.  

Micromachines, Vol. 7, Iss. 2, 2016-02 ,pp. : 23-23

MDPI

Access to resources Recommend Favorite

Integrating copper at the nanometer length scale with Sn–3·5Ag solder to develop high performance nanocomposites

By Babaghorbani P.   Nai S. M. L.   Gupta M.  

Materials Science and Technology, Vol. 25, Iss. 10, 2009-10 ,pp. : 1258-1264

Maney Publishing

Access to resources Recommend Favorite