A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam

Author: Fu Y.   Shen Z.   Bryan N.K.A.  

Publisher: Elsevier

ISSN: 0026-2692

Source: Microelectronics, Vol.35, Iss.2, 2004-02, pp. : 111-115

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