Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nanoelectronic devices

Author： Bender H   Franquet A   Drijbooms C   Parmentier B   Clarysse T   Vandervorst W   Kwakman L  

Publisher： IOP Publishing

E-ISSN： 1361-6641|30|11|114015-114025

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.30, Iss.11, 2015-11, pp. : 114015-114025

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