Selective bonding and encapsulation for wafer-level vacuum packaging of MEMS and related micro systems

Author: Tao Y.   Malshe A.P.   Brown W.D.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.44, Iss.2, 2004-02, pp. : 251-258

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next