Author： Choi D.J. Koo W.H. Jeong S.M. Han D.W. Lee D.Y. Baik H.K. Jang S.W. Lee S.M.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.72, Iss.4, 2004-01, pp. : 445-451
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