Barrier studies on porous silk semiconductor dielectric

Author: Tokei Z.   Iacopi F.   Richard O.   Waeterloos J.   Rozeveld S.   Beach E.   Mebarki B.   Mandrekar T.   Guggilla S.   Maex K.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 352-357

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