Author: Tokei Z. Iacopi F. Richard O. Waeterloos J. Rozeveld S. Beach E. Mebarki B. Mandrekar T. Guggilla S. Maex K.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 352-357
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