Impact of LKD5109(TM) low-k to cap/liner interfaces in single damascene process and performance

Author： Iacopi F.   Patz M.   Vos I.   Tokei Z.   Sijmus B.   Le Q.T.   Sleeckx E.   Eyckens B.   Struyf H.   Das A.   Maex K.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 293-301

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