Catalyst and processing effects on metal-assisted chemical etching for the production of highly porous GaN

Author: Geng Xuewen   Duan Barrett K.   Grismer Dane A.   Zhao Liancheng   Bohn Paul W.  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.28, Iss.6, 2013-06, pp. : 65001-65010

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Abstract