Structural and electrical anisotropies of Si-doped a -plane (11-20) GaN films with different SiN x interlayers

Author： Ji Hoon Kim   Hwang Sung-Min   Yong Gon Seo   Kwang Hyeon Baik   Jung Ho Park  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.28, Iss.8, 2013-08, pp. : 85007-85014

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