![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Goumri-Said Souraya Ozisik Haci Deligoz Engin Mohammed Benali Kanoun
Publisher: IOP Publishing
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.28, Iss.8, 2013-08, pp. : 85005-85015
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Iron nitride mask and reactive ion etching of GaN films
Journal of Electronic Materials, Vol. 27, Iss. 4, 1998-04 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)