Energy-loss mechanism of single-crystal silicon microcantilever due to surface defects generated during plasma processing

Author: Wada Akira   Yanagisawa Yuuki   Altansukh Batnasan   Kubota Tomohiro   Ono Takahito   Yamasaki Satoshi   Samukawa Seiji  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65020-65026

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