Design and fabrication of a high-aspect-ratio parylene-based comb-drive actuator for large displacements at a low driving force

Author： Kuo Wen-Cheng Chen Chen-Wei Liu Chih-Ming

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65021-65027

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