Author: Chien-Lin Chang Chien Huang Yu-Che Hu Syue-Fong Chang Chung-Min Yip Ming-Chuen Fang Weileun
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65019-65028
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Abstract