System for illumination of an EUV-nanolithograph mask

Author： Zuev S.   Pestov A.   Polkovnikov V.   Salashchenko N.   Skryl' A.   Strulya I.   Toropov M.   Chkhalo N.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1027-4510

Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 517-519

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