Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

Author: Salashchenko N.   Skryl' A.   Toropko M.   Chkhalo N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 512-516

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Abstract