Multiwavelength Micro-Raman Characterization of Epitaxial Si 1−x Ge x Layers on Si(100) and In-Line Process Monitoring Applications

Author: Chang Chun-Wei  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.41, Iss.11, 2012-11, pp. : 3125-3129

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