Defect characterization of n-type Si 1−x Ge x after 1.0 kev helium-ion etching

Author: Goodman S.   Auret F.   Nauka K.   Malherbe J.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.5, 1997-05, pp. : 463-469

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