Ion-assisted pulsed magnetron sputtering deposition of ta-C films

Author: Bugaev S.P.   Podkovyrov V.G.   Oskomov K.V.   Smaykina S.V.   Sochugov N.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 16-26

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Abstract