Catalytic properties of thin films by simultaneous oblique sputter deposition of two materials from different directions

Author: Watanabe Y.   Hyodo S.-A.   Motohiro T.   Hioki T.   Sugiura M.   Noda S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.256, Iss.1, 1995-02, pp. : 68-72

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Abstract