Degradation during sputter deposition of solid electrolyte thin films for microsystems

Author： Seguin J.-L.   Lambert-Mauriat C.   Aguir K.   Bendahan M.   Jacolin C.   Lauque P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 87-91

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