In situ mass spectral and IR studies of the role of auxiliary reagents in the enhancement of copper growth in the chemical vapor deposition of Cu(II) -diketonate precursors

Author： Kaloyeros A.E.   Zheng B.   Lou I.   Lau J.   Hellgeth J.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.262, Iss.1, 1995-06, pp. : 20-30

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