Structural and optical properties modification of a-SiC:H by Ga + ion implantation

Author： Tsvetkova T. Angelov O. Sendova-Vassileva M. Dimova-Malinovska D. Bischoff L. Adriaenssens G.J. Grudzinski W. Zuk J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.70, Iss.2, 2003-03, pp. : 467-470

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