Optical pattern formation in a-SiC:H films by Ga + ion implantation

Author： Bischoff L.   Teichert J.   Kitova S.   Tsvetkova T.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 73-77

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