A study on the structural characterization of a-SiC:H films by the gas evolution method

Author： Park J.-H. Choi J.-B. Kim H.-Y. Lee K.-Y. Lee J.-Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 129-132

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