On the homogeneity of sputter-deposited ITO films Part I. Stress and microstructure

Author: Vink T.J.   Walrave W.   Daams J.L.C.   Baarslag P.C.   Van Den Meerakker J.E.A.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 145-151

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Abstract