On the homogeneity of sputter-deposited ITO films Part II. Etching behaviour

Author: Van Den Meerakker J.E.A.M.   Baarslag P.C.   Walrave W.   Vink T.   Daams J.L.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 152-156

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Abstract