A theoretical study of the effect of thermal annealing on curvature changes in multilayered structures

Author: Miaoulis N.   Rosenberg S.E.   Wong P.Y.   Miaoulis I.N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 64-68

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Abstract