Investigation of different oxidation processes for porous silicon studied by spectroscopic ellipsometry

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Elsevier

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Influence of the formation conditions on the microstructure of porous silicon layers studied by spectroscopic ellipsometry

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Spectroscopic ellipsometry on silicon-oxide films on silicon

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Spectroscopic ellipsometry study of amorphous silicon anodically oxidised

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Characterization of In 0.48 Ga 0.52 P-based thin-layer structures using spectroscopic ellipsometry

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