Microscopic characterization of microcrystalline silicon thin films

Author: Sieber I.   Schmidt M.   Urban I.   Dorfel I.   Koynov S.   Schwarz R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 314-317

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Abstract