Shedding light on the growth of amorphous, polymorphous, protocrystalline and microcrystalline silicon thin films

Author: Fontcuberta i Morral A.   Roca i Cabarrocas P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 161-164

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Abstract