Investigation of different oxidation processes for porous silicon studied by spectroscopic ellipsometry

Author： Frotscher U.   Rossow U.   Ebert M.   Pietryga C.   Richter W.   Munder H.   Arens-Fischer R.   Berger M.G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 36-39

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