Integration of SiGe heterojunction bipolar transistors in a 200 mm industrial BiCMOS technology

Author: De Berranger E.   Bodnar S.   Chantre A.   Regolini J.L.   Mouis M.   Kirtsch J.   Monroy A.   Granier A.   Laurens M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 250-253

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Abstract