Production of 1-m size uniform plasma by modified magnetron-typed RF discharge with a subsidiary electrode for resonance

Author： Urano Y.   Li Y.   Kanno K.   Iizuka S.   Sato N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 60-64

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