Oxidation processes in hydrogenated amorphous silicon nitride films deposited by ArF laser-induced CVD at low temperatures

Author: Banerji N.   Serra J.   Gonzalez P.   Chiussi S.   Parada E.   Leon B.   Perez-Amor M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 214-218

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