Integrated CVD-PVD Al plug processing for sub-half micron features

Author： Konecni A.   Dixit G.   Russell N.M.   Luttmer J.D.   Havemann R.H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 52-57

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