Effect of the carrier gas on the metal-organic chemical vapor deposition of TiN from tetrakis-dimethyl-amido-titanium

Author: Rhee S.-W.   Yun J.-Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.2, 1998-05, pp. : 163-165

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Abstract