Low-temperature deposition of films from tetrakis(dimethylamido)titanium and ammonia

Author: Berry A.   Mowery R.   Turner N.H.   Seitzman L.   Dunn D.   Ladouceur H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 10-17

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Abstract