Synthesis of Sn-doped a-C:H films by RF plasma-enhanced chemical vapor deposition and their characterization

Author： Inoue Y. Komoguchi T. Nakata H. Takai O.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 41-45

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