Micro-scratch test study of TiN films grown on silicon by chemical vapor deposition

By Benayoun S.   Hantzpergue J.J.   Bouteville A.  

Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. : 187-193

Elsevier

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Comparison of tribological behavior of three films - TiN, TiCN and CrN - grown by physical vapor deposition

By Su Y.L.   Yao S.H.   Leu Z.L.   Wei C.S.   Wu C.T.  

Wear, Vol. 213, Iss. 1, 1997-12 ,pp. : 165-174

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Deposition and characterization of multilayered TiN/ZrN coatings

By Tavares C.J.   Rebouta L.   Almeida B.   Bessa e Sousa J.   da Silva M.F.   Soares J.C.  

Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. : 124-128

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Effects of chlorine on tribological properties of TiN films prepared by pulsed d.c. plasma-enhanced chemical vapor deposition

By Kawata K.   Sugimura H.   Takai O.  

Thin Solid Films, Vol. 407, Iss. 1, 2002-03 ,pp. : 38-44

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Laser chemical vapour deposition of TiN and TiC films

By Feng Z.C.   Liang Y.   Hou W.L.   Zhang B.C.   Wang Y.Q.   Li L.   Cao L.X.  

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