Sputtering process of carbon nitride films by using a novel bio-molecular C-N containing target

Author: Lu T.R.   Chen L.C.   Chen K.H.   Bhusari D.M.   Chen T.M.   Kuo C.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 74-79

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract