Heat treatment in high pressure H 2 O vapor used for improvement of Si&unknown;O bonding network near SiO 2 /Si interface

Author: Sameshima T.   Sakamoto K.   Satoh M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 138-141

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Abstract