Preparation of AlN thin films by nitridation of Al-coated Si substrate

Author: Huang J.   Wang L.   Shen Q.   Lin C.   Ostling M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.340, Iss.1, 1999-02, pp. : 137-139

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Abstract