Recent results of multi-cathode electron beam plasma source

Author: Kim T.Y.   Noh S.J.   Jing J.K.   Lee K.O.   Chung K.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 178-181

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Abstract