Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering

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Thin Solid Films, Vol. 351, Iss. 1, 1999-08 ,pp. : 151-157

Elsevier

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Composite Ag/C:H films prepared by DC planar magnetron deposition

By Boldyryeva H.   Hlidek P.   Biederman H.   Slavinska D.   Choukourov A.  

Thin Solid Films, Vol. 442, Iss. 1, 2003-10 ,pp. : 86-92

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Composite metal/C:H films prepared by unbalanced magnetron sputtering: Ni/C:H

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Vacuum, Vol. 47, Iss. 12, 1996-12 ,pp. : 1453-1463

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Characterization of an unbalanced magnetron for composite film (metal/C:H) deposition

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Composite metal/C:H films prepared in an unbalanced magnetron

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