Experiments and analyses of SiC thin film deposition from organo-silicon by a remote plasma method

Author: Hatanaka Y.   Sano K.   Aoki T.   Wrobel A.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 287-291

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Abstract